| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic heater, with which trimming according to a preset condition can be carried out, without the occurrence of breakage of wires and the like, on a resistance heating element upon performing the trimming by irradiation using laser beam irradiation. SOLUTION: Upon forming (n+1)-th groove after having formed (n-th) groove by irradiating the laser beam on the resistance heating element, the grooves are formed by irradiating the laser beam in such a way that the successive groove following it is each alternately formed in the opposite side across the first groove. |
