| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation temperature measuring device and a radiation temperature measuring method capable of realizing highly accurate temperature measurement without depending on the emissivity of a measuring object, and a semiconductor manufacturing device. SOLUTION: This radiation temperature measuring device including a lamp house 1 for heating a wafer 3 by irradiating the wafer 3 with light is characterized by being equipped with a wafer 4 for constituting a closed space by combination with the wafer 3, and reflecting light radiated from the wafer 3 in the closed space, photodetectors 9a, 9b for measuring the intensity of light provided from the wafers 3, 4 in the closed space, and a control part 29 for controlling the lamp house 1 so that the intensities of light measured by the photodetectors 9a, 9b become equal, and measuring the equalized light intensity.
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