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发明名称
Methode for forming interconnection line of Semiconductor device
摘要
申请公布号
KR100568864(B1)
申请公布日期
2006.04.10
申请号
KR20040001967
申请日期
2004.01.12
申请人
发明人
分类号
H01L21/28;H01L21/033;H01L21/20;H01L21/311;H01L21/4763;H01L21/768
主分类号
H01L21/28
代理机构
代理人
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