发明名称 SUBSTRATE TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To increase supply capability in a fluid supply source for cooling, since the cooling fluid is supplied simultaneously from the fluid supply source for cooling to a plurality of heat-treatment sections, when a set temperature for heating is reduced by the plurality of heat-treating sections. SOLUTION: When the set temperature on the temperature reduction side of a heat plate is to be changed in each heat-treatment unit, the supply of the cooling fluid to each heat-treatment unit is carried out successively, while being shifted in time based on the set temperature of the heat-treatment unit after each change.
申请公布号 JP2002190440(A) 申请公布日期 2002.07.05
申请号 JP20000389152 申请日期 2000.12.21
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 OTANI MASAMI
分类号 G03F7/30;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/30
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