| 摘要 |
PROBLEM TO BE SOLVED: To provide inspection equipment and an inspection method of a light-receiving element, which improve precision and stability in inspection and can provide a light- receiving element of high reliability. SOLUTION: This inspection equipment of the light-receiving element which outputs a light-receiving signal, according to a radiated light level to the light-receiving surface is provided with a light irradiation means, wherein the light receiving surface of the light-receiving element is irradiated with an inspection light of a prescribed level and the light-receiving surface is scanned with the inspection light; and a data processing means 24 including a processing system which forms image data, on the basis of a light receiving signal from the light-receiving element at each scanning point of the inspection light and performs prescribed processings. The processing system of the data processing means 24 is provided with an inspection range setting part 50, wherein the image data are subjected to binary processing, a shape of the light-receiving surface is extracted, on the basis of the binary image data; a reference position is determined; and inspection range is set on the basis of the reference position, and an inspection part 60, which inspects the defect of the light-receiving element, on the basis of image data in the inspection range set by the inspection range setting part 50.
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