发明名称 DEVICE AND METHOD FOR DETECTING POSITION
摘要 PROBLEM TO BE SOLVED: To prevent erroneous recognition in position detection by pattern matching. SOLUTION: The same template images are overlapped while changing the relative position, and the correlative value is computed in each position to obtain the amount of coincidence. The amount of coincidence takes the maximum value in the coincident position of both images, while rapidly falls in its vicinity. Using this, the amount of coincidence is computed from the correlative value of the template image and an input image, and the coincident position is determined on condition that the same fall of the amount of coincidence appears in the vicinity of the maximum value.
申请公布号 JP2002190021(A) 申请公布日期 2002.07.05
申请号 JP20000390131 申请日期 2000.12.22
申请人 SHINKAWA LTD 发明人 SUGAWARA KENJI
分类号 B23Q17/24;G06K9/20;G06T1/00;G06T7/00;H01L21/60 主分类号 B23Q17/24
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