PLASMA CORROSION RESISTANT QUARTZ GLASS MEMBER AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a plasma corrosion resistant quartz glass member which can completely annihilate microcracks and has excellent plasma corrosion resistance, and a method of manufacturing the same. SOLUTION: The surface of the quartz glass member is made transparent and smooth by subjecting its surface to hot melt treatment and the surface made transparent and smooth is subjected to surface roughening treatment, by which the surface is roughened.