| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly precise scanning type probe microscope not affected by hysteresis and aging effect of a piezoelectric element, capable of reducing a data volume and a calculation volume for generating an image, and capable of enlarging band limitation of a scanning frequency. SOLUTION: This microscope has a scan control means for controlling a raster scan of an XYZ translator, and a displacement detecting means for detecting a displacement amount of the XYZ translator, and only the displacement amount of the XYZ translator along a scanning axis of a low frequency out of two scanning axes in the raster scan is feedback-controlled. The displacement amount of the XYZ translator along the scan axis of high frequency is made larger than an observing area, and the displacement amount of the XYZ translator is sampled at the same time when a relative position of a probe comes within the observing area. |
