发明名称 |
OPTICAL ELEMENT DEFORMATION SYSTEM, SPECIFIC DEFORMATION SYSTEM FOR OPTICAL ELEMENT, AND SPECIFIC DEFORMATION METHOD OF OPTICAL ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To remove an image error of an optical element in the projection lens, and to actively adjust the image error. SOLUTION: In a specific deformation system of the optical element in the projection exposure machine especially having the projection lens of the micro- lithography use in the imaging apparatus for removing the image error or actively adjusting the image error, a piezoelectric element 3 is adhered to or integrated into the surface to be deformed as an actuator of the thin plate, thin film, or thin layer. By combining with an adaptronic servo loop having a sensor 4, and controlling the operation of the piezoelectric element 3 as an actuator, a force and/or a moment are added to the optical element, and the optical element is specified and deformed. |
申请公布号 |
JP2002189193(A) |
申请公布日期 |
2002.07.05 |
申请号 |
JP20010285772 |
申请日期 |
2001.09.19 |
申请人 |
CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS |
发明人 |
SORG FRANZ;XALTER STEFAN;MUHLBEYER MICHAEL;GELLRICH BERNHARD;MELZER FRANK;ITTNER THOMAS |
分类号 |
G02B26/00;G02B5/10;G02B13/24;G02B26/06;G02B26/08;G02B27/00;G02B27/18;G03F7/20;H01L21/027;(IPC1-7):G02B27/18 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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