| 摘要 |
PROBLEM TO BE SOLVED: To achieve an ideal temperature profile on a substrate. SOLUTION: A chain 13 engaged to a gear 12 connected to a driving section 11 is mounted on a transmission gear 14 of each unit for composing a chain conveyer section. The transmission gear 14 is rotated for driving a conveyer- section chain 16 mounted on the transmission gear 14. In the transmission gear 14, a plurality of gears having different diameters are provided, the gear having an arbitrary diameter is selected by a speed selection gear 17 corresponding to a desired traveling speed. Also, a gear 15 is mounted on the conveyer section chain 16, and one portion of the conveyer chain 16 travels in parallel with an oven 21, and at the same time toward the transfer end direction from a conveyer start end. Such unit is provided in series in the direction of a chain 13 (the transfer direction of the substrate 30), thus completing a series of chain conveyers that can change speed in a plurality of steps over a plurality of zones.
|
