发明名称 |
ELECTRONIC COMPONENT BONDING METHOD AND DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To simplify device constitution and to improve productivity at bonding of an electronic component to the loading part of a substrate without deviations. SOLUTION: In this electronic component bonding method, the positional deviation from a reference position of the electronic component 2 held by a holding means (holding nozzle 33) is detected, and the position deviation in a rotating direction among the detected positional deviations of the electronic component 2 is corrected by the turning of a turning arm 32.
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申请公布号 |
JP2002190483(A) |
申请公布日期 |
2002.07.05 |
申请号 |
JP20000391458 |
申请日期 |
2000.12.22 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
ARIE MAKOTO;UEMURA SATORU |
分类号 |
H01L21/60;H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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