发明名称 ELECTRONIC COMPONENT BONDING METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To simplify device constitution and to improve productivity at bonding of an electronic component to the loading part of a substrate without deviations. SOLUTION: In this electronic component bonding method, the positional deviation from a reference position of the electronic component 2 held by a holding means (holding nozzle 33) is detected, and the position deviation in a rotating direction among the detected positional deviations of the electronic component 2 is corrected by the turning of a turning arm 32.
申请公布号 JP2002190483(A) 申请公布日期 2002.07.05
申请号 JP20000391458 申请日期 2000.12.22
申请人 SHIBAURA MECHATRONICS CORP 发明人 ARIE MAKOTO;UEMURA SATORU
分类号 H01L21/60;H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/60
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