| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment method and apparatus for homogeneously treatment a body to be treated in a treatment chamber and prolonging the service life of the device. SOLUTION: An induced electromagnetic field that is induced by an antenna coil 11, that is provided at the atmospheric side of a dielectric window 5 and is connected to a high-frequency power supply 4, is made uniform by metal thin films 12, 12a-12l, that are provided near the antenna coil 11. |
