METHOD AND APPARATUS FOR PRETREATMENT OF METAL ANALYSIS SAMPLE, AND ANALYZER FOR ELEMENT IN METAL

摘要

PROBLEM TO BE SOLVED: To provide a means whose operability for removing contamination on the surface part of a sample is satisfactory, when trace components in a metal are analyzed, and to provide an analyzer for an element in the metal by using the means. SOLUTION: In the pretreatment method for a metal analytical sample, before the component in the metal is analyzed, the surface of the metal analysis sample is sputtered and cleaned inside a pretreatment chamber maintained at inert-gas atmosphere. While the metal analysis sample is being supported from the bottom face side by a sample receiver whose ratio of a contact area to the metal analytical sample is very small, it is subjected to sputtering.