DETECTOR AND METHOD FOR DETECTING FOREIGN MATTER AND DEFECT

摘要

PROBLEM TO BE SOLVED: To accurately and quickly discriminate and detect a defect such as a flaw and a foreign matter, in inspection for an inspection object such as a semiconductor wafer. SOLUTION: This detector is provided with a detecting means for detecting a reflection-scattered beam, from the inspection object, of a laser beam emitted toward the inspection object in plural directions, and for comparing detected results to detect directivity of the reflection-scattered beam.