发明名称 OXIDE SINTER AND PROCESS FOR PRODUCING THE SAME
摘要 An oxide sinter having a perovskite structure represented by the chemical formula MRuO3 (wherein M is at least one of calcium, strontium, and barium), characterized in that the total content of the alkali metals, including sodium and potassium, iron, nickel, cobalt, chromium, copper, and aluminum in the sinter is 100 ppm or lower, the uranium content and thorium content therein each is 10 ppb or lower, and the sinter has a relative density of 90% or higher. The oxide sinter, having a perovskite structure represented by the chemical formula MRuO3 (wherein M is at least one of calcium, strontium, and barium), is obtained through sintering from an MRuO3 sintering material highly purified to 4 N or higher. The sintering can be conducted at a lower temperature. The sinter can have a high-density.
申请公布号 WO02051769(A1) 申请公布日期 2002.07.04
申请号 WO2001JP08044 申请日期 2001.09.17
申请人 NIKKO MATERIALS COMPANY, LIMITED;SUZUKI, RYO 发明人 SUZUKI, RYO
分类号 C04B35/00;C01G55/00;C04B35/01;C04B35/645;C23C14/34;H01L21/203;H01L21/316;(IPC1-7):C04B35/00 主分类号 C04B35/00
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