发明名称 Method for determination of cure and oxidation of spin-on dielectric polymers
摘要 This invention is a method comprising preparing a sample by coating a thin film of a precursor material, which is free of fluorescent probe molecules onto a substrate and subjecting the precursor material to conditions to attempt to cause cure of the precursor to an organic, aromatic, polymer having a dielectric constant of less than 3.0, exposing the sample to radiation having a wavelength in the range of 200 to 500 nm, detecting a resulting emission of radiation, and comparing the emission to the emission for a known cured, non-oxidized standard for the polymer.
申请公布号 US2002086429(A1) 申请公布日期 2002.07.04
申请号 US20000751484 申请日期 2000.12.28
申请人 MOHLER CAROL E.;DEVRIES ROBERT A. 发明人 MOHLER CAROL E.;DEVRIES ROBERT A.
分类号 G01N21/31;G01N33/44;H01L21/66;H01L23/532;(IPC1-7):H01L21/66;G01R31/26;G01N31/00 主分类号 G01N21/31
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