LCC device inspection module

摘要

An LCC inspecting device includes a mirror having non-parallel front and rear surfaces, and reflective coatings on the front and rear surfaces. The reflective coatings reflect light of frequencies different from each other such that light of a first frequency reflects off the front surface of the mirror and light of a second, different frequency reflects off the rear surface. The LCC device may therefore be inspected from different angles by selectively using light of the first and second frequencies.