WORKPIECE TRANSFER SYSTEM, TRANSFER METHOD, VACUUM CHUCK, AND WAFER CENTERING METHOD

摘要

A wafer (W) transfer system (E) comprises a host computer (1) for managing the production of semiconductor devices, probers (2) for checking electrical characteristics of the wafer (W) under control by this host computer (1), an AGV (3) for automatically transferring wafers (W) in a carrier to deliver the wafers (W) one by one to these probers (2) in response to the request of each of the probers (2), and an AGV controller (4) for controlling this AGV (3) under control by the host computer.