HIGH PERFORMANCE SUBSTRATE SCANNING

摘要

An optical scanning system for examining material associated with a substrat e includes at least one scanning module for displacing two or more objective lenses, at least one optical coupling system and a translation system. The t wo objective lenses are mounted on one or more scan arms and are constructed to scan over regions or subregions associated with the substrate. The scanning module is configured to displace the scan arm(s) to perform the scan and thereby displace the two objective lenses. Each objective lens is arranged t o deliver light to the material and collect light from the material.