发明名称 TEST CHAMBER UNIT FOR TESTING SEMICONDUCTOR DEVICE
摘要 A test chamber unit for testing a semiconductor device is provided to simplify a test process, eliminate a test delay time, and shorten a total test time by performing the test process without performing a sorting process. A test tray loading unit(10) is used for loading a plurality of test trays including semiconductor devices as test targets. A test unit performs a test process by connecting electrically the semiconductor devices of the test trays received from the test tray loading unit with a test socket of a test head. A test tray unloading unit(20) is used for receiving and loading the test trays of the tested semiconductor devices.
申请公布号 KR100674417(B1) 申请公布日期 2007.01.29
申请号 KR20050068914 申请日期 2005.07.28
申请人 MIRAE CORPORATION 发明人 PARK, YONG GEUN;PARK, JAE WAN;YANG, GUN HONG
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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