发明名称 |
TEST CHAMBER UNIT FOR TESTING SEMICONDUCTOR DEVICE |
摘要 |
A test chamber unit for testing a semiconductor device is provided to simplify a test process, eliminate a test delay time, and shorten a total test time by performing the test process without performing a sorting process. A test tray loading unit(10) is used for loading a plurality of test trays including semiconductor devices as test targets. A test unit performs a test process by connecting electrically the semiconductor devices of the test trays received from the test tray loading unit with a test socket of a test head. A test tray unloading unit(20) is used for receiving and loading the test trays of the tested semiconductor devices.
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申请公布号 |
KR100674417(B1) |
申请公布日期 |
2007.01.29 |
申请号 |
KR20050068914 |
申请日期 |
2005.07.28 |
申请人 |
MIRAE CORPORATION |
发明人 |
PARK, YONG GEUN;PARK, JAE WAN;YANG, GUN HONG |
分类号 |
H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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