发明名称 Device for exposure of a peripheral area of a film circuit board
摘要 To expose the peripheral area of a film with high precision while the film is being transported, even if the peripheral area of the film has an arch or a fold, the edge of a copper foil on a TAB strip is determined by way of an optical detector which includes a light projection section and a light receiving section. The sliding base and the projection lens unit are moved such that the amount of light received by the light receiving part is constant. Ultraviolet light is concentrated on the peripheral area of the copper foil of the TAB strip, by which the peripheral area is exposed. The projection lens unit is provided with a nozzle from which air is blown onto the area of the TAB strip which is undergoing peripheral area exposure. This area is pressed by the pressure of the air against the surface of the carrier so that the peripheral area of the TAB strip can be made planar even if the strip has an arch or a fold. Thus, exposure can be performed with high precision without the mask edge image becoming blurred.
申请公布号 US2002085191(A1) 申请公布日期 2002.07.04
申请号 US20010023728 申请日期 2001.12.21
申请人 MIMURA YOSHIKI;TOCHIHARA KAZUMOTO 发明人 MIMURA YOSHIKI;TOCHIHARA KAZUMOTO
分类号 G03F7/20;H01L21/60;H05K1/00;H05K3/00;(IPC1-7):G03B27/72;G01N21/64;G03B27/52;G03B27/42 主分类号 G03F7/20
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