Temperature-compensated pressure sensor includes membrane, compensator and flexural element with selected mechanical- and thermal properties

摘要

A flexural element (6) is located opposite the membrane (2) accepting pressure. It is made of a material with different coefficient of thermal expansion. The temperature compensator (4) is an at least locally-planar body with greater flexural rigidity than the membrane. Its deformation behavior differs from that of the flexural element, compensating the membrane under conditions of temperature variation.