Measurement probe for detecting electrical signals in an integrated semiconductor circuit

摘要

A measurement probe for detecting electrical signals in an integrated circuit on a semiconductor chip has a lever arm and a probe tip which is configured on the lever arm. The lever arm is made of a highly conductive material that is covered by an extremely thin insulator layer. The probe tip has a window in the insulator layer at the apex point, and the lever arm makes contact through the insulator layer. This measurement probe can be operated in a force mode and in a tunneling mode, in order to move to a measurement point on the integrated circuit with high positioning accuracy, and to detect the electrical signals at this measurement point.