发明名称 Method of fabricating X-ray detecting device
摘要 A method of fabricating an X-ray detecting device that is capable of preventing breakage of a transparent electrode. In the method, patterning of first and second insulating films occurs at different etching rates, with an etching ratio of the second insulating material to the first insulating material being greater than 1. Accordingly, undercut of the first and second insulating materials can be prevented. This stabilizes the step coverage of a subsequently formed transparent electrode.
申请公布号 US2002084475(A1) 申请公布日期 2002.07.04
申请号 US20010025905 申请日期 2001.12.26
申请人 HO MOON KYO 发明人 HO MOON KYO
分类号 G01T1/24;H01L27/146;H01L31/08;(IPC1-7):H01L29/768;H01L27/148 主分类号 G01T1/24
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