| 摘要 |
<p>A pattern material supply unit (300) is provided with a shower head (310) for spraying a liquid pattern material (312) in mist-like fine particles. A treating stage (318) to mount a work (20) thereon is provided below the shower head (310). The work (20) has on the surface thereof a liquid-repellency-treated mask provided with a pattern-forming opening. Voltage is applied to the work (20) via the treating stage (318) by a dc power supply (328) to attract fine particles of the liquid pattern material (312) by electrostatic force. The treating stage (318), by being rotated, fills up the pattern forming opening in the mask with the liquid pattern material deposited to the mask surface, and can heat and solidify the liquid pattern material by a built-in heather (326).</p> |
