发明名称 |
Flexible nozzle system for gas distribution plate of plasma reaction chamber |
摘要 |
A flexible nozzle system for the gas distribution plate of a plasma reaction chamber. The gas distribution plate is a metal plate having a plurality of clamping holes and a plurality of removable nozzle modules inserted into the clamping holes.
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申请公布号 |
US2002084352(A1) |
申请公布日期 |
2002.07.04 |
申请号 |
US20010812048 |
申请日期 |
2001.03.19 |
申请人 |
CHEN CHIEN-WEI |
发明人 |
CHEN CHIEN-WEI |
分类号 |
C23C16/44;C23C16/455;(IPC1-7):A62C31/02;B05B1/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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