发明名称 |
MANUFACTURING INTEGRATED CIRCUITS |
摘要 |
Techniques are provided for manufacturing phase-shifted masks. According to one technique, a facilitator provides, on behalf of a set of one or more parties that desire masks, subsidies for production of phase-shifted masks. The manufacture of the phase-shifted masks is paid using compensation that includes the subsidies from the facilitator. One or more mask makers manufacture the phase-shifted masks for the compensation. The facilitator receives, from the set of one or more parties, compensation for the subsidies based on one or more factors including a factor that reflects market success of integrated circuits produced using the phase-shifted masks. In addition to the subsidies, the facilitator may provide a variety of value-added services. |
申请公布号 |
WO02052344(A2) |
申请公布日期 |
2002.07.04 |
申请号 |
WO2001US50851 |
申请日期 |
2001.12.26 |
申请人 |
NUMERICAL TECHNOLOGIES, INC. |
发明人 |
WEED, J., TRACY;PIERRAT, CHRISTOPHE;PATI, YAGYENSH, (BUNO);SHARAN, ATUL |
分类号 |
G03F1/00;G03F7/20 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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