| 摘要 |
<p>A micromachined transducer such as a condenser microphone with a support structure and a rigid plate with an electically conductive plate electrode secured to the support structure at predetermined locations. A diaphragm of a substantially non-conductive material is secured to the support structure along its periphery at a predetermined distance from the substantially rigid plate, whereby the susbtantially rigid plate and the diaphragm define an air gap. The diaphragm is movable in response to sound pressure and carries an electrically conductive diaphragm electrode. The support structure and the diaphragm electrode are electrically interconnected so as to have substantially the same electrical potential. A layer of a substantially non-conductive material is disposed between the substantially rigid plate and the support structure at least at the predetermined locations. Such a transducer is suitable for use in scientific and industrial sound measurement equipment using high polarisation voltages, eg 200 V.</p> |
