METHODS AND APPARATUS FOR REMOVING TRACE IMPURITIES FROM INERT AND NON-REACTIVE GASES AND REACTIVE GASES AND FLUIDS

摘要

This invention provides methods of preparing ultra-low emission (ULE) carbon materials. The ULE carbon materials are capable of removing impurities for inert and non-reactive gases down to parts-per-billion (ppb) and sub-ppb levels without concurrently emitting other impurities such as moisture or carbon dioxide to the purified gas stream. The invention further provides methods of preparing preconditioned ultra-low emission (P-ULE) carbon materials. The P-ULE carbon materials are capable of removing impurities from reactive gases down to parts-per-billion (ppb) and sub-ppb levels without concurrently emitting other impurities such as moisture or carbon dioxide to the purified gas stream. The ULE and P-ULE carbon materials can be used as "stand-alone" purifier materials or in combination with other scavenging materials that are capable of removing large quantities of impurities such as oxygen and moisture that are not removed or only marginally removed by the ULE or P-ULE carbon materials.