| 发明名称 |
MEMBRANE FOR A CAPACITIVE VACUUM MEASURING CELL |
| 摘要 |
<p>A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 mum, in particular less than 120 mum. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.</p> |
| 申请公布号 |
EP1040333(B1) |
申请公布日期 |
2002.07.03 |
| 申请号 |
EP19980956751 |
申请日期 |
1998.12.04 |
| 申请人 |
UNAXIS BALZERS AKTIENGESELLSCHAFT |
发明人 |
BJOERKMAN, PER |
| 分类号 |
G01L7/08;G01L9/00;G01L9/12;(IPC1-7):G01L9/00 |
主分类号 |
G01L7/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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