Optical mount unit and oscillation damping system

摘要

In an oscillation damping system, the oscillations which act on an optical element (1) in an objective, in particular on deformation-decoupled mounts (2,2',6) and manipulators in a projection illumination arrangement, in particular in a projection objective for microlithographic projection exposure objective lithography, are detected by sensors (3). By actuators (4) waves with same or at least similar frequencies and amplitudes of anti-phases to the disturbing oscillations are generated and introduced in said mount (2). <IMAGE>