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发明名称
METHOD FOR PROVIDING A DOPANT LEVEL FOR POLYSILICON FOR FLASH MEMORY DEVICES
摘要
申请公布号
EP1218938(A1)
申请公布日期
2002.07.03
申请号
EP20000948725
申请日期
2000.07.14
申请人
ADVANCED MICRO DEVICES INC.
发明人
CHANG, KENT, KUOHUA;AU, KENNETH, WO-WAI;FANG, HAO
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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