发明名称 Semiconductor device, method for manufacturing same and thin plate interconnect line member
摘要 The present invention provides a low-profile and light-weight semiconductor device having improved product reliability and higher frequency performance. A multi-layer interconnect line structure is disposed just under circuit devices 410 a and 410 b. An Interlayer insulating film 405 that composes a part of the multi-layer interconnect line structure is formed of a material having a relative dielectric constant within a range from 1.0 to 3.7, and a dielectric loss tangent within a range from 0.0001 to 0.02.
申请公布号 US7301228(B2) 申请公布日期 2007.11.27
申请号 US20030725993 申请日期 2003.12.03
申请人 SANYO ELECTRIC CO., LTD.;KANTO SANYO SEMICONDUCTORS CO., LTD. 发明人 USUI RYOSUKE;MIZUHARA HIDEKI;IGARASHI YUSUKE;KOJIMA NORIAKI;SAKAMOTO NORIAKI
分类号 H01L23/04;H01L23/498;H05K1/00;H05K1/02;H05K3/20;H05K3/46 主分类号 H01L23/04
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