发明名称 Method and apparatus for loading, unloading and transferring semiconductor bars
摘要 Method for moving a plurality of semiconductor bars in the stages of positioning them on and removing them from equipment for producing semiconductor devices, comprising the stages of: simultaneously picking up the said semiconductor bars contained in a process support of a first machine which carries out a first processing operation on the said bars; simultaneously positioning the said bars adjacent to each other; inserting the said bars, adjacent to each other, into a support for a second stage of processing. <IMAGE>
申请公布号 EP1219397(A1) 申请公布日期 2002.07.03
申请号 EP20000128545 申请日期 2000.12.27
申请人 CORNING O.T.I. S.P.A. 发明人 REICHENBACH, DAVIDE;LAMENDOLA, RITALBA;DI EGIDIO, MARCO;REDAELLI, LUIGI
分类号 B28D5/00;H01L21/677 主分类号 B28D5/00
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