发明名称 |
Method and apparatus for loading, unloading and transferring semiconductor bars |
摘要 |
Method for moving a plurality of semiconductor bars in the stages of positioning them on and removing them from equipment for producing semiconductor devices, comprising the stages of: simultaneously picking up the said semiconductor bars contained in a process support of a first machine which carries out a first processing operation on the said bars; simultaneously positioning the said bars adjacent to each other; inserting the said bars, adjacent to each other, into a support for a second stage of processing. <IMAGE> |
申请公布号 |
EP1219397(A1) |
申请公布日期 |
2002.07.03 |
申请号 |
EP20000128545 |
申请日期 |
2000.12.27 |
申请人 |
CORNING O.T.I. S.P.A. |
发明人 |
REICHENBACH, DAVIDE;LAMENDOLA, RITALBA;DI EGIDIO, MARCO;REDAELLI, LUIGI |
分类号 |
B28D5/00;H01L21/677 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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