| 摘要 |
<p>A sensor (23,24) is provided for identifying the type of discharge lamp (1) mounted as the light source of an exposure apparatus, and at least one of an optical condition, power-source condition and cooling condition is set based upon the identification made. For example, an optical condition is changed by adjusting the zoom lens (3) of an illuminating optical unit in dependence upon the type of discharge lamp (1). Alternatively, a power-source condition or discharge-lamp cooling performance is changed by setting the range of allowable power applied to the discharge lamp (1). <IMAGE></p> |
