发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR CARRIER FILM
摘要 PURPOSE: To provide a method for manufacturing a semiconductor carrier film, by which a circuit board having fine-pitch patterns can be produced and the semiconductor carrier film with high reliability and low cost can be produced. CONSTITUTION: The method for manufacturing the semiconductor carrier film, where a substrate made of a copper foil of 12 μm or more in thickness and a polyamide-based film is used, and the copper foil is etched to a thickness of 5 to 9 μm.
申请公布号 KR20020052225(A) 申请公布日期 2002.07.03
申请号 KR20010054419 申请日期 2001.09.05
申请人 MITSUI MINING & SMELTING CO., LTD. 发明人 KATAOKA TATSUO;OZAWA IKUHIRO
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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