METHOD FOR HOLDING THIN PLATE AND FLOATING HOLDING MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a method for holding a thin plate and a floating holding mechanism wherein the thin plate can be set on the holding mechanism from the upright direction and prevented from collision with a receiving surface of the holding mechanism without generating a bending stress and hindering restoration by a corrective force. SOLUTION: In the method for holding the thin plate wherein the thin plate 4 such as a liquid crystal substrate floating over a airslider 7 is held to be carried into an inspection station, the thin plate 4 is held by the holding member 16 while the height of the holding member 16 which holds the thin plate 4 is made to follow the floating height of the thin plate 4.