,申请号JP19990152114-传众专利搜索

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发明名称
摘要
申请公布号	JP3298563(B2)	申请公布日期	2002.07.02
申请号	JP19990152114	申请日期	1999.05.31
申请人		发明人
分类号	H01L21/302;H01L21/306;H01L21/3065;H01L21/308;H01L21/338;H01L29/812;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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