Force balancing capacitance manometer

摘要

An apparatus for measuring the differential pressure between at least two fluids including (a) first and second pressure enclosures; (b) first and second pressure deformable members where the first deformable member is sealingly connected to the first pressure enclosure and second deformable member is sealingly connected to the second pressure enclosure and the pressure deformable members are rigidly linked so as to move as one unit; (c) a frame for locating the first and second pressure enclosures in fixed relationship to one another; (d) a position sensing device for determining the displacement of the pressure deformable members relative to the frame; (e) a force balancing device including a first portion rigidly connected to the frame and a moveable second portion connected to the pressure deformable members; (f) a transducer for transducing the displacement of the first and second pressure deformable members into a force acting on the moveable second portion of the force balancing device in a direction to decrease the displacement, the first pressure deformable member including a nonflexible circular first plate sealingly connected to at least one flexible first shell of revolution where the first shell is concave on one surface thereof and said second pressure deformable member including a nonflexible circular second plate sealingly connected to at least one flexible second shell of revolution where the second shell is concave on one surface thereof.