发明名称 Semiconductor device capable of improving manufacturing
摘要 In a method for manufacturing a semiconductor device, probe pads are formed simultaneously with formation of an intermediate conductive layer, and a test operation is performed upon the semiconductor device by placing probes on the probe pads. Then, post-stage processes are performed upon the semiconductor device in accordance with characteristics of the semiconductor device obtained by the test operation.
申请公布号 US6414336(B2) 申请公布日期 2002.07.02
申请号 US20010902259 申请日期 2001.07.11
申请人 NEC CORPORATION 发明人 KAYASHIMA YUJI
分类号 H01L23/52;H01L21/3205;H01L21/66;H01L23/58;H01L29/78;(IPC1-7):H01L23/48 主分类号 H01L23/52
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