REFLECTIVE SPATIAL LIGHT MODULATOR ARRAY

摘要

A reflective spatial light modulator array is described incorporating liquid crystal devices, mirrors, a semiconductor substrate, electrical circuits, an d a reflector/absorber layer for blocking light. The invention overcomes the pro blem of shielding light from semiconductor devices, high optical throughput and cont rast, pixel storage capacitance to hold the voltage across the liquid crystal devi ce and precise control of the liquid crystal device thickness without spacers obscu ring the mirrors.