发明名称 |
Substrate loader for a semiconductor processing system |
摘要 |
A substrate loader for a semiconductor substrate processing system that generally includes a wall having an exterior side with one or more apertures formed therethrough and a related method of loading a processing system. A door assembly is movably coupled to the wall in each of the apertures and is adapted to temporarily retain the substrate. A first portion of the door assembly substantially closes the aperture when the door assembly is in a first or closed position, and a second portion of the door assembly substantially closes the aperture when the door assembly is in a second or open position. A robot for transferring a substrate in a processing system is also provided.
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申请公布号 |
US6413356(B1) |
申请公布日期 |
2002.07.02 |
申请号 |
US20000562252 |
申请日期 |
2000.05.02 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHOKSHI HIMANSHU J.;JU BEN;HILTON ERIC J. |
分类号 |
H01L21/677;(IPC1-7):C23F1/02 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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