| 摘要 |
A surface displacement detecting apparatus for detecting a concave, a hole on a surface of a detection object, comprises a light shielding device provided in a direction crossing the surface of the detection object, a light irradiating device provided at one side of the light shielding device and to irradiate the detection object with light; a light receiving device provided at the other side of the light shielding device and to receive at least one of regular reflection light and diffuse reflection light from the surface of the detection object; and a conveyor to convey at least one of the detection object and the light irradiating device.
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