Incorporation of supplementary heaters in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same

摘要

An ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. The silicon substrate has a series of ink channels formed therein along the length of the substrate. An insulating layer or layers overlying the silicon substrate has a series of nozzle openings or bores formed therein along the length of the substrate and each nozzle bore communicates with a respective ink channel. A primary heater element is associated with each nozzle bore for asymmetrically heating the ink in the nozzle bore. A secondary heater element is provided upstream of the primary heater element and formed in the insulating layer to preheat ink just prior to entry of the ink into the nozzle bores.