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发明名称
摘要
申请公布号	JP3298174(B2)	申请公布日期	2002.07.02
申请号	JP19920244705	申请日期	1992.09.14
申请人		发明人
分类号	H01L21/60;H01L21/321;H01L27/146;(IPC1-7):H01L27/146	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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