发明名称 Method of manufacturing electronic components
摘要 A method of manufacturing electronic components includes disposing a top metal layer (502) comprised of solder over a bottom metal layer (201, 202) comprised of titanium or tungsten, and selectively etching the bottom metal layer (201, 202) over the top metal layer (502) with an etchant mixture (601) comprised of an etchant, an additive to control the temperature of the etchant mixture (601), and another additive to reduce the redeposition of the top layer (502).
申请公布号 US6413878(B1) 申请公布日期 2002.07.02
申请号 US20000546595 申请日期 2000.04.10
申请人 MOTOROLA, INC. 发明人 WOOLSEY ERIC J.;MITCHELL DOUGLAS G.;CARNEY GEORGE F.;CARNEY, JR. FRANCIS J.;POWELL CARY B.
分类号 H01L21/768;C01B15/037;C23F1/26;H01L21/306;H01L21/308;H01L21/3213;H01L21/60;(IPC1-7):H01L21/00;C23F1/00 主分类号 H01L21/768
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