发明名称 METHOD AND APPARATUS FOR CALIBRATING A LASER WAVELENGTH CONTROL MECHANISM
摘要 <p>Calibration of a wavelength adjustment mechanism (104) of a laser is achieve d using a hollow cathode absorption lamp (114). The lamp is provided with a vaporous material having a precisely known wavelength of maximum absorption. A photo-detector (130) detects the amount of light from the laser beam absorbe d by the vaporous material as a function of wavelength. The wavelength of the laser is adjusted to achieve maximum absorption such that the actual laser beam wavelength may be compared with an expected wavelength to determine a calibration offset. The hollow cathode lamp (114) is operated to produce a vaporous material of known absorption characteristic but is illuminated at a level substantially below a level required for conventional opto-galvanic resonance.</p>
申请公布号 CA2198713(C) 申请公布日期 2002.07.02
申请号 CA19942198713 申请日期 1994.08.31
申请人 CYMER, INC. 发明人 FOMENKOV, IGOR
分类号 G01J3/51;G01J;G01J1/42;G01J3/12;G01J3/28;G01J9/00;H01S;H01S3/10;H01S3/13;H01S3/139;H01S3/225;(IPC1-7):G01J3/51 主分类号 G01J3/51
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