发明名称 |
METHOD AND APPARATUS FOR CALIBRATING A LASER WAVELENGTH CONTROL MECHANISM |
摘要 |
<p>Calibration of a wavelength adjustment mechanism (104) of a laser is achieve d using a hollow cathode absorption lamp (114). The lamp is provided with a vaporous material having a precisely known wavelength of maximum absorption. A photo-detector (130) detects the amount of light from the laser beam absorbe d by the vaporous material as a function of wavelength. The wavelength of the laser is adjusted to achieve maximum absorption such that the actual laser beam wavelength may be compared with an expected wavelength to determine a calibration offset. The hollow cathode lamp (114) is operated to produce a vaporous material of known absorption characteristic but is illuminated at a level substantially below a level required for conventional opto-galvanic resonance.</p> |
申请公布号 |
CA2198713(C) |
申请公布日期 |
2002.07.02 |
申请号 |
CA19942198713 |
申请日期 |
1994.08.31 |
申请人 |
CYMER, INC. |
发明人 |
FOMENKOV, IGOR |
分类号 |
G01J3/51;G01J;G01J1/42;G01J3/12;G01J3/28;G01J9/00;H01S;H01S3/10;H01S3/13;H01S3/139;H01S3/225;(IPC1-7):G01J3/51 |
主分类号 |
G01J3/51 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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