发明名称 Non-corrosive cleaning composition for removing plasma etching residues
摘要 A non-corrosive cleaning composition for removing residues from a substrate. The composition comprises: (a) water; (b) at least one hydroxylammonium compound; (c) at least one basic compound, preferably selected from the group consisting of amines and quaternary ammonium hydroxides; (d) at least one organic carboxylic acid; and (e) optionally, a polyhydric compound. The pH of the composition is preferably between about 2 to about 6.
申请公布号 US6413923(B2) 申请公布日期 2002.07.02
申请号 US19990439469 申请日期 1999.11.15
申请人 发明人
分类号 G03F7/42;B08B3/08;C09K13/00;C11D7/10;C11D7/26;C11D7/32;C11D7/60;C11D11/00;C23G1/04;H01L21/027;H01L21/304;H01L21/3065;(IPC1-7):C11D1/62 主分类号 G03F7/42
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