发明名称 Seal for sealing and load bearing a process tube in a vacuum system
摘要 A seal for sealing and load bearing a process tube in a vacuum system including a seal member and a load bearing spacer provided in a seal cavity. The seal generally includes a seal cavity provided in a housing, where the seal cavity is configured opposite the process tube. At least one load bearing spacer is received within the seal cavity and adapted to contact the process tube is mounted to the housing. Additionally, at least one seal member is received within the seal cavity and adapted to contact the process tube.
申请公布号 AU3056602(A) 申请公布日期 2002.07.01
申请号 AU20020030566 申请日期 2001.12.19
申请人 TOKYO ELECTRON LIMITED 发明人 STEVEN T. FINK
分类号 F16J15/00;F16L17/06;F16L23/16;F16L39/00 主分类号 F16J15/00
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