| 摘要 |
<p>A flow rate control apparatus is provided to stably control a flow rate of fluid by integrating a passage switching unit and a pressure control unit with a base unit of a stack structure. A base unit(18) has a pressure fluid passage, a pressure fluid input port(12), a pressure fluid output port(14), and a pressure sensor port(16) and is formed by integrally stacking a plurality of plates(24a~24e) and a diaphragm functioning as a valve plug(26) between the plates. A pressure control unit is installed on a side of the base unit to control pressure of pressure fluid flowing through the passages. A pressure sensor is installed on a side of the base unit to detect pressure of the pressure fluid flowing between a plurality of attachment ports. A passage switching unit(22) is installed on a side of the base unit to switch communication states of a plurality of passages(40) to connect the pressure control unit and the pressure fluid output port so that the pressure fluid controlled by the pressure control unit flows toward the pressure fluid output port.</p> |
